Table of contents 1. Introduction 2. Volume diffusion 2.1 Fick’s equations 2.2 Boltzmann’s transformation, Parabolic law 2.3 Atomic aspects of volume diffusion 2.4 Interdiffusion 2.4.1 Atomic fluxes 2.4.2 Interdiffusion coefficient 2.5 Composition dependent diffusion coefficient – Diffusion asymmetry 2.6 Discrete / atomistic models 2.6.1 One dimensional kinetic mean filed model (KMF) 2.6.2 Three dimensional kinetic Monte Carlo model (KMC) 3. Nanoscale effects in volume diffusion 3.1 Introduction 3.2 Validity of the continuum approximation in multilayers – Continuum models deteriorate on the nanoscale 3.3 Sharp interface shift 3.3.1 Computer simulations 3.3.2 Experiments 3.4 Interface shift kinetics – Anomalous (Non-Fickian) diffusion kinetics 3.4.1 Completely miscible ($$V=0$$) and phase separating ($$V>0$$) systems 3.4.1.1 Computer simulations and theory 3.4.1.2 Experiments 3.4.2 Ordering systems ($$V<0$$) – Solid state reaction 3.4.2.1 Computer simulations 3.4.2.2 Experiments 3.5. Change of interface morphology 3.5.1 Interface sharpening in completely miscible alloys 3.5.1.1 Computer simulations 3.5.1.2 Experiments 3.5.2 Dissolution and off-stoichiometric formation of compound layers in solid state reactions 3.6. Summary Bibliography